Plasma treating apparatus.

摘要

A plasma treating apparatus for a sheet-like structure which comprises a generally drum-shaped first discharge electrode assembly (2) rigidly mounted on a rotary shaft (17) for rotation together therewith so as to extend through a vacuum vessel, which sheet-like structure is adapted to follow the outer periphery of the first discharge electrode assembly, and a second discharge electrode assembly (3) disposed within the vacuum chamber so as to confront the first discharge electrode assembly (2). The vacuum vessel (1) is electrically insulated from an electric circuit (6) which is connected with both of the first (2) and second (3) discharge electrode assemblies, through the intervention of insulating members (14, 15) for electrically insulating the both from each other. These insulating members (14, 15) are interposed between a cylindrical body of the drum of the first discharge electrode assembly (2) and the rotary shaft (17).