| 摘要 |
PURPOSE:To improve corrosion resistance and mechanical reliability by forming a corrosion preventive layer consisting of >=1 kinds among an oxide, nitride and carbide and two kinds of carbon protective layers which are different in hardness on a thin magnetic film. CONSTITUTION:The corrosion resistant layer consisting of >=1 kinds of the oxide, nitride and carbide and having 150-800Angstrom film thickness is formed on the thin magnetic film on a substrate and further are two kinds of the carbon layers which are different in hardness and have 50-300Angstrom film thickness are coated as the protective layers thereon. The soft carbon layer is provided as a buffer layer to weaken the impact with a head and the hard layer thereon prevents the chipping of the protective layer. The corrosion resistance and mechanical reliability are thus highly improved.
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