| 摘要 |
PURPOSE:To efficiently produce the title solid product consisting essentially of silicon by irradiating a compd. having an Si-F bond by laser. CONSTITUTION:Laser is projected into the gaseous atmosphere of a compd. such as Si2F6 having an Si-F bond to cause photolysis, and a solid product consisting essentially of silicon is obtained. Si2F6, for example, is supplied into a reaction vessel 1 from a cylinder 3 through a pressure and flow controller 2. An anchor plate 4 is provided in the atmosphere contg. the Si2F6, and the anchor plate is heated by a heater 5. CO2 laser light 6 is radiated on the anchor, plate 4 through a window 7 for IR rays, and a white or colored film consisting essentially of silicon is formed on the anchor plate 4. Consequently, a solid product consisting essentially of silicon can be efficiently produced. |
