| 摘要 |
An accelerometer capable of sensing acceleration in 3 orthogonal directions while being formed in a single silicon wafer comprises 3 cantilever beams (2) etched from the wafer, each having a mass (3) asymmetric to the neutral plane (A) of the beam, and formed by etching away the beam (2) on one face only of the wafer. The beams are arranged at 120 DEG to each other so that their sensing axes (S) are orthogonal or approximately so. Deflection of the beams is measured by piezoelectric, electrostatic or electrodynamic effect and force feedback is preferably employed, again using one of these effects. |
