| 摘要 |
PURPOSE:To develop function as a high performance sensor, by immobilizing a bio-sensitive substance on the polymer membrane formed on the surface of the gate insulating film of an electric field effect transistor by the plasma polymerization of a specific compound. CONSTITUTION:A bio-sensitive substance is immobilized on the polymer membrane formed on the surface of the gate insulating film of an electric field effect transistor by the plasma polymerization of at least one compound selected from a group consisting of benzene, toluene and xylene. As xylene, 0-xylene, m-xylene and p-xylene are used. the electric field effect transistor is pref. constituted by coating the gate peripheral part, especially, the electrode part thereof with a resin or glass. Since the polymer membrane excellent in oxygen stability, smoothness and adhesiveness is formed on the surface of the gate insulating film of the electric field effect transistor and the bio-sensitive substance is immobilized on the membrane, the capacity as a sensor is excellent. |
