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发明名称
METHOD FOR LASER CHEMICAL DEPOSITING FROM GASEOUS PHASE OF THIN METAL LAYERS
摘要
申请公布号
BG42454(A1)
申请公布日期
1987.12.15
申请号
BG19860076035
申请日期
1986.08.01
申请人
SHANOV,VESELIN N.;NENOVA,MIRA I.;IVANOV,BORISLAV L.
发明人
SHANOV,VESELIN N.;NENOVA,MIRA I.;IVANOV,BORISLAV L.
分类号
C23C16/18;C23C16/20;(IPC1-7):C23C16/18
主分类号
C23C16/18
代理机构
代理人
主权项
地址
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