THIN FILM FORMING APPARATUS

摘要

PURPOSE:To form a uniform thin film with high productivity by a simple structure by placing a magnetic field generator in a metallic vacuum vessel and making the vessel act as a microwave resonator so that all of electric power supplied can be converted into energy for generating plasma. CONSTITUTION:This thin film forming apparatus is provided with a resistance heating and evaporating source 7, a substrate holder 2 and a magnetic field generator 5 in a metallic vessel 1 having an evacuation system 11 under the bottom and a microwave introducing window 9 in the wall. A line of magnetic force is generated on the surface of a substrate 3 in a direction perpendicular to the surface of the substrate 3 with the magnetic field generator 5.