| 摘要 |
PURPOSE:To easily remove a thin film sticking to the inner wall of a treating apparatus having a formed thin Al film without scratching the inner wall after a thin film is treated, by immersing the inner wall in an alkali soln. and washing it. CONSTITUTION:A thin Al film 4 is previously formed on the surface of a jig 1 used to treat a thin film or on the inner wall 1 of a treating apparatus. After a thin film is treated, the jig 1 or the inner wall 1 having the formed thin Al film 4 is immersed in an alkali soln. 6, taken out and washed to remove a thin film 2 sticking to the Al film 4 together with the Al film 4.
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