| 摘要 |
PURPOSE:To prevent the deformation of a chuck plate and the exfoliation of a dielectric layer, by forming a film shaped electrode on the upper surface of a ceramic substrate, laminating a glass intermediate layer, which covers the film shaped electrode, on the upper surface of the substrate, and forming an insulating dielectric layer on the upper surface of the glass intermediate layer. CONSTITUTION:A glass intermediate layer 6, which covers an inner electrode 2, is formed on the upper surface of a plate shaped ceramic substrate 1. An insulating dielectric layer 8, on which a sample 7 is mounted, is formed on the upper surface of the glass intermediate layer 6. An inorganic impregnated layer 9 is formed on the surface of the dielectric layer 8. Another electrode 10 is contacted with the sample 7. Thus the sample 7 is sucked and fixed to the surface of the dielectric layer 8 with an electrostatic sucking force. As a ceramic material constituting the substrate 1, nitride or carbide characterized by high thermal conductivity and excellent insulating property is used. Then, the cooling effect of the substrate 1 can be improved. The heat in the surface of the dielectric layer 8 is made uniform. The chuck plate is not deformed. With the flatness of the sample mounting surface being several mum or less, the adhesive strength of the dielectric layer can be enhanced. |
