发明名称 FURNACE DOOR CLOSING DEVICE
摘要 PURPOSE:To assure closing of a furnace door by a method wherein an operating bar servicable for controlling inner furnace elements is passed through a window part of the furnace door to be opened and closed while a pusher to close the furnace door is fixed on the outer furnace part of the operating bar. CONSTITUTION:A window part 3 is provided on the central part of double doors opening on hinges to make an operating bar 4 pass the through while the operating bar 4 can be fitted with a shifting quartz boat to place any inner furnace elements on the end of furnace. On the other hand, a door pusher 5, a spiral spring body 6 and a fixture 7 are fixed on the outer furnace part. With the operating bar 4 shifted this side, the door pusher 5 separates from the furnace door 2 to open the same 2. When the door 2 is shifted the other side to insert the inner furnace elements including those to be processed for arrangement, the throat door is closed with the door pusher 5 thrusted thereon by the compressive repulsion of the spiral spring body 6. At this time, the furnace door 2 is not subjected to any defective alignment due to the resultant thermal strain while assuring excellent reproducibility of closing the furnace door 2.
申请公布号 JPS62286234(A) 申请公布日期 1987.12.12
申请号 JP19860130788 申请日期 1986.06.05
申请人 MATSUSHITA ELECTRONICS CORP 发明人 UEDA YASUSHI;ASAHI KUNIHIKO
分类号 H01L21/205;H01L21/31 主分类号 H01L21/205
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