| 摘要 |
PURPOSE:To prevent the adhesion of a liquid droplet to a substrate and to shorten a film forming time, by forming a film while the substrate is alternately held in two horizontal and vertical directions. CONSTITUTION:At first, a substrate is horizontally held with respect to a liquid surface and lowered downwardly in this state to transfer the monomolecular film developed on the liquid surface to the substrate 7. At this time, the monomolecular film 10 can be instantaneously adhered to the entire film adhering surface of the substrate 7. Next, the substrate 7 is rotated around one end thereof to be made vertical to the liquid surface. In this vertical state, when the substrate 7 is drawn upwardly and the monomolecular film 10 is built up on the substrate 7, no liquid droplet is left on the substrate 7. Subsequently, the film adhering surface of the substrate 7 is again turned downwardly to be held horizontally and, by repeating the same process, a Y-shaped monomolecular built-up film having a desired built-up degree can be formed. |
