| 摘要 |
<p>PURPOSE:To effectively remove toxic components such as AsH3, PH3, SiH4, B2H6, SeH4 and the like by contacting a purifying agent of specific composition and density, comprising CuO blended with metallic oxides of Nb, Ta and the like, with exhaust gas. CONSTITUTION:For example, alkali such as sodium carbonate or the like is dropped into a water solution of copper nitrate and niobium chloride (V) to form a sediment of basic copper carbonate and niobium hydroxide, and said sediment is dried and calcined to prepare a mixture of cupric oxide and niobium oxide with a composition of 0.01-0.7 of metal atomic ratio of Nb/(Nb+Cu). Said composite is molded to prepare a molded product of 1.5-3.5g/ml density. The exhaust gas coming from a semiconductor manufacturing process and the like containing more than one kind of arsine, phosphine, silane, diborane and hydrogen selenide is flowed into a purification cylinder filled with the purifying agent to contact the said agent and various toxic hydrides are adsorbed and removed.</p> |
