| 摘要 |
PURPOSE:To avoid occurrence of a temperature error in the flowing direction of a subject to be controlled in an application mode of a power supply without causing the overshoot nor deterioration of operability with a temperature controller, by providing a temperature error detecting means, a temperature error control means, etc. CONSTITUTION:The temperature signals received from the 1st and 2nd detecting circuits 22 and 32 are supplied to the 1st and 2nd differential amplifiers 27 and 37 serving as the temperature error detecting means. Thus the temperature errors are detected and supplied to the 1st and 2nd temperature error comparators 28 and 38. Then these temperature errors are compared with the set temperature error signals supplied from the 1st and 2nd temperature error setters 29 and 39 of a temperature error control means 10. When the temperature error exceeds the set temperature error, the control output is delivered to the 1st or 2nd control circuit 25 or 35. Thus the drive outputs of the circuits 25 and 35 lower the heating values of the 2nd band heaters 20 and 30 to control the temperature error under the set temperature error range. Thus it is possible to avoid occurrence of a temperature error in the flowing direction of a subject to be controlled in a power supply application mode without causing the overshoot nor deterioration of operability with a temperature controller.
|
