| 摘要 |
PURPOSE: To prevent the erroneous movement in classifying operation, by providing a sorting and classifying device for products or for processes of wafers utilizing buffer carriers between a wafer comparing device and an unloader, and distributing the functions of the unloader. CONSTITUTION:Wafer sorting and classifying functions are separated from a conventional unloader and arranged as a buffer carrier classifying device 6 between a loader 4 and an unloader 8. The buffer carrier classifying device 6 controls the movements of a wafer track 9 and buffer carriers in accordance with production control data from a plurality of the buffer carriers and integrated data processing devices. Wafers for products or for processes are contained in the corresponding buffer carriers as a sublot unit by a wafer sorting and containing mechanism. The wafer track 9 and the buffer carriers are driven again by a wafer returning mechanism 7 based on the control of the buffer carrier classifying device 6 and the other production control data. Aligning sequence is provided and the wafers are sent on the track again.
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