发明名称 OPTICAL APPARATUS FOR FORMING CROSS LINEAR IMAGE ELEMENT
摘要 In the described optical device a linear object element forms an image by two straight lines crossing each other at a specific angle. Thus it is possible to achieve a crosswise movement of the image point downstream of the optical device with only a single linear scanning movement upstream of the optical device. In particular it is possible to scan plane structures with a single scanning movement.
申请公布号 JPS62286014(A) 申请公布日期 1987.12.11
申请号 JP19870123597 申请日期 1987.05.19
申请人 KARL JIYUUSU KG GMBH & CO PURECHIJIONSUGEREET FUR BITSUSENSHIYAFUTO & IND 发明人 PAURU KAIZERU
分类号 G02B27/10;G02B17/02;G02B27/14;G03F9/00;H01L21/027;H01L21/30;H01L21/68 主分类号 G02B27/10
代理机构 代理人
主权项
地址