发明名称 |
OPTICAL APPARATUS FOR FORMING CROSS LINEAR IMAGE ELEMENT |
摘要 |
In the described optical device a linear object element forms an image by two straight lines crossing each other at a specific angle. Thus it is possible to achieve a crosswise movement of the image point downstream of the optical device with only a single linear scanning movement upstream of the optical device. In particular it is possible to scan plane structures with a single scanning movement. |
申请公布号 |
JPS62286014(A) |
申请公布日期 |
1987.12.11 |
申请号 |
JP19870123597 |
申请日期 |
1987.05.19 |
申请人 |
KARL JIYUUSU KG GMBH & CO PURECHIJIONSUGEREET FUR BITSUSENSHIYAFUTO & IND |
发明人 |
PAURU KAIZERU |
分类号 |
G02B27/10;G02B17/02;G02B27/14;G03F9/00;H01L21/027;H01L21/30;H01L21/68 |
主分类号 |
G02B27/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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