| 摘要 |
PURPOSE:To form a uniform magnetic film without variation of composition in the film broadwise direction by forming a rare-earth transition metal amorphous alloy magnetic film while parting a disk base and a vapor-deposition source gradually at vapor-deposition. CONSTITUTION:A boat 3 being a resistor heater and a dish placing the vapor- deposition source 2 is arranged at the inner bottom of a vacuum tank 1 and a support member 5 supporting a disk base 4 is arranged at the upper part. The vapor-deposition source 2 is an alloy between a rare-earth metal and a transition metal. In raising the support member 5 from the height shown in, e.g., solid lines to the height shown in 2-dashed chain lines at the vapor- deposition, to part the distance (h) between the vapor-deposition source 2 and the disk base gradually. Thus, the composition distribution of the magnetic film in the thickness direction is uniform.
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