发明名称 MASK HOLDER
摘要 <p>A rectangular plate holder is formed with an approximately square recess defined by an upstanding perimetrical wall having two top studs on one side and one top stud on an opposed side wall lapped to be coplanar in a common plane. The base plates include five and three sets of mask clamping points for defining clamping points for five and three mask sizes. Each clamp includes a clamp assembly fastened to the base having a spring-loaded lower clamping arm below an upper set screw clamping point. A handle is fixed to one side between the opposed sides having the lapped studs.</p>
申请公布号 JPS62286053(A) 申请公布日期 1987.12.11
申请号 JP19870112232 申请日期 1987.05.08
申请人 MAIKURION LTD PAATONAASHITSUPU 发明人 NIKORASU GUARINO
分类号 G03F1/00;B25B1/06;B25B1/24;B25B5/06;G03F1/14;H01L21/027;H01L21/30;H01L21/68 主分类号 G03F1/00
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