| 摘要 |
PURPOSE:To obtain a cassette holder which can receive two kinds of cassettes and reduce cost and installation area by providing a holder case in the front and rear surfaces with respective inlet/output ports, the inlet/output port in the front surface being for exclusive use of a first kind of cassettes and the inlet/outlet port in the rear surface being for exclusive use of a second kind of cassettes. CONSTITUTION:A holder case 1 is provided in the front and rear surfaces with inlet/output ports 13a, 13b, respectively, and each cassette table 9 is composed of a first cassette table portion 9a for receiving a first cassette 3a and a second cassette table portion 9b for a second cassette 3b. A robot in a first process brings in and takes out the cassette 3a through the inlet/outlet port 13a, and a robot in a second process brings in and takes out the cassette 3b through the inlet/outlet port 13b. Thus, two kinds of cassettes can be handled in a cassette holder, permitting reduction of cost and installation area of the holder.
|
