| 摘要 |
PURPOSE:To facilitate pellet bonding visual inspection with high reliability by a method wherein ideal external lines of a pellet are obtained by picked-up images of the pellet and its neighborhood and various defects are detected with those ideal external lines as reference. CONSTITUTION:The pellet and its neighborhood of an object 4 to be inspected are brightly lighted by a visualized part lighting source 3. In this state, the image of the pellet and its neighborhood is enlarged by a suitable multiplying factor in an optical system 2 and detected by a TV camera 1. After the image signal picked up by the TV camera 1 is binarized by an A/D converter 5, the image signal is stored by the image memory of an image processor 6. The ideal external lines of the pellet are obtained by processing the stored image data into images. The deviation between the actual external lines and the predetermined external lines is obtained and, if the deviation does not exceed a certain value at all the corresponding points, it is judged that no defect exists and, if it does, it is judged that the defect exists.
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