| 摘要 |
PURPOSE:To obtain an apparatus which can float and transfer a relatively large and heavy article, with the clean-room environment maintained, by forming in the surface of a ceramic rotating disc mounted on the extreme end of a driving shaft grooves for generating dynamic pressure in opposition to a plane floor surface. CONSTITUTION:When a motor 24 is energized with the load of a floating table 4 supported by a floor surface 1, grooves 41, 44 formed on the front surface 3 and rear surface 32 of a ceramic rotating disc 26 for generating dynamic pressure becomes effective to generate dynamic pressure of fluid at respective sliding portions, so that the load of the floating table 4 can be supported by fluid films. As a bearing plate 30 in slidable contact with the rear surface of the rotating disc 26 is mounted through a resilient member 29 composed of plane rubber, any deviation in the path of rotation of the rear surface of the rotating disc 26 can be absorbed by deformation of the resilient member 29. Thus constructed, the apparatus can stably provide floating support, with the clean-room environment maintained.
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