| 摘要 |
PURPOSE:To reduce variance in characteristics by arranging plural ultrasonic transducers which are provided on the surface of a silicon substrate having a 2nd electrodes in plural holes in an array shape. CONSTITUTION:An upper electrode 49 of gold, aluminum, etc., is vapor-deposited on a polyester film 48 which is a thin organic material film for transmitting and receiving an ultrasonic wave and this polyester film 48 vibrates up and down over nonpenetrating etching holes 12 bored in a silicone substrate 1 to transmit and receive the ultrasonic wave. The upper electrode 49 and a lower electrode 6 are arranged on both sides of the main surface of the polyester film 48 and when the polyester film 48 vibrates, a different potential difference is applied or generated. The lower electrode 6 is also connected electrically to an integrated circuit for driving and reception which is formed on the silicone substrate 1 through aluminum wiring 21 placed on an oxide film 3. Consequently, the variance in characteristics is reduced.
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