发明名称 IRRADIATION OPTICAL SYSTEM
摘要 PURPOSE:To convert a Gaussian intensity distribution among intensity dis tributions of light, to a uniform intensity distribution, by using a fly's eye lens constituted of a lens having a focusing action or a diverging action in one direction determined against an optical axis. CONSTITUTION:The fly's eye lens 30 is constituted of lenses 20, 21, 22, 23 and 24 having a focusing action in only one direction determined against the optical axis. Also, in the intensity distribution of light, the Gaussian intensity distribution 10 of light in which the intensity distribution in at least one axis of two axes whose sections are intersected orthogonally shows a Gaussian distribution can be converted to a roughly uniform intensity distribution by the fly's eye lens 30, and the utilization efficiency of light can be improved.
申请公布号 JPS62284340(A) 申请公布日期 1987.12.10
申请号 JP19860127443 申请日期 1986.06.02
申请人 NIPPON TELEGR & TELEPH CORP <NTT> 发明人 TAKAMOTO KIICHI;OZAKI YOSHIHARU
分类号 G02B5/02;G02B3/00;G03B27/54;G03F7/20;H01L21/027;H01L21/30;H01S3/101 主分类号 G02B5/02
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