发明名称 |
Tunn film av ett amorft magnetiskt material och förfarande för framstä llning av denna |
摘要 |
This invention relates to a thin film of an amorphous magnetic material including ion-nitride having the formula FexN1-x, where x is from 0.4 to 0.7. The film is deposited on a substrate by sputter deposition in the presence of an inert gas and at a pressure from 25 mu m to 100 mu m. The coercivity of the magnetic material varies as a function of the gas pressure employed during sputtering. |
申请公布号 |
FI74165(C) |
申请公布日期 |
1987.12.10 |
申请号 |
FI19790002600 |
申请日期 |
1979.08.21 |
申请人 |
INTERNATIONAL BUSINESS MACHINES, |
发明人 |
ALBERT,PAUL ANDRE;HEIMAN,NEIL DUANE;POTTER,ROBERT IVAN;WHITE,ROBERT LEE |
分类号 |
C23C14/14;C22C45/02;C23C14/06;G11B5/64;G11B5/65;H01F10/13;H01F10/18;H01F10/187;H01F41/18;(IPC1-7):H01F10/10;H01F41/14 |
主分类号 |
C23C14/14 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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