| 摘要 |
PURPOSE:To produce the title extremely fine powder of AlN by using a gaseous mixture of N2 and NH3 or the gaseous mixture further added with an inert gas as the ambient atmosphere when metallic Al is melted in the frame of arc or a plasma jet to produce the fine powder. CONSTITUTION:Al 4 is charged in the heating furnace 5 in a closed vessel 8, and the inside of the closed vessel 8 is evacuated. The Al 4 is heated and melted in the heating furnace 5, gaseous N2 is introduced from a gas inlet 1 for a discharge electrode, and gaseous NH3 is introduced from an inlet 2 for an atmospheric gas as a spiral-flow gas around an arc plasma 3. In this case, the ratio of N2 to NH3 is controlled to 0.01-50, and the gaseous mixture is diluted, as required, with an inert gas to form a dilute (N2+NH3) gas atmosphere. The active chemical species such as NH2, NH, N, etc., formed by the decomposition of NH3 in the arc plasma 3 reacts with Al vapor, and extremely fine AlN powder is formed. |
