| 摘要 |
PURPOSE:To make it possible to observe the uneven form in the vertical direction highly precisely, by observing stereoscopically utilizing plural images on the same sample to recognize three-dimensional form, and making up an image by multiplying only the magnification in the height direction. CONSTITUTION:An electron microscope analysis device is composed by connecting an image storing file 1, a graphic terminal device 3, and a data input/output device 4 to an image arithmetic unit 2. Furthermore, to the image arithmetic unit 2, a three-dimensional coordinate calculator 202, a height direction magnification converter 203, and a color element position calculator 204 are included. By observing stereoscopically plural images on the same sample, the three-dimensional coordinates of each color element are infered, and, only the height coordinate is expanded on that coordinates and projected on the image screen. Therefore, without converting the horizontal magnification of a semiconductor product, for example, the uneven form in the vertical direction which is an extremely small size can be observed in a high magnification and in a broad area. |
