发明名称 |
Pressure sensor |
摘要 |
A pressure sensor includes a metal diaphragm provided at the end of a pressure introduction portion, a glass layer bonded to a surface of the metal diaphragm opposite to the pressure introduction side thereof, and a semiconductor chip acting as a semiconductor strain gauge bonded to the surface of the glass layer.
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申请公布号 |
US4712082(A) |
申请公布日期 |
1987.12.08 |
申请号 |
US19860842175 |
申请日期 |
1986.03.21 |
申请人 |
NIPPON SOKEN, INC. |
发明人 |
ITO, NOVUEI;NISHIDA, MINORU;MIZUNO, NAOHITO;HATTORI, TADASHI |
分类号 |
G01L9/04;G01L9/00;(IPC1-7):G01L1/22 |
主分类号 |
G01L9/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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