发明名称 Pressure sensor
摘要 A pressure sensor includes a metal diaphragm provided at the end of a pressure introduction portion, a glass layer bonded to a surface of the metal diaphragm opposite to the pressure introduction side thereof, and a semiconductor chip acting as a semiconductor strain gauge bonded to the surface of the glass layer.
申请公布号 US4712082(A) 申请公布日期 1987.12.08
申请号 US19860842175 申请日期 1986.03.21
申请人 NIPPON SOKEN, INC. 发明人 ITO, NOVUEI;NISHIDA, MINORU;MIZUNO, NAOHITO;HATTORI, TADASHI
分类号 G01L9/04;G01L9/00;(IPC1-7):G01L1/22 主分类号 G01L9/04
代理机构 代理人
主权项
地址