发明名称 POWER INDUCER
摘要 PURPOSE:To enable immediate confirmation of a state where power is not transmitted, by detecting a deviation in relative position of a driver from a follower magnet by means of a change of a line of magnetic force. CONSTITUTION:A guide cylinder 12 communicating with a vacuum chamber 11 is provided in this apparatus,a follower 13 composed of a magnet is slidably equipped in the inner part of this guide cylinder 12 and an interlocking bar 14 secured at one end to said follower 13 faces the vacuum chamber 14. An annular driver 15 composed of a magnet is slidably fitted to the outer periphery of the guide cylinder 12 so as to be opposed to the follower 13. If the follower 13 deviates by a given distance from a position in which it is regularly opposed to the driver 15, magnetic detecting means 21, 22 detect a change in magnetism to output a detection signal.
申请公布号 JPS62281755(A) 申请公布日期 1987.12.07
申请号 JP19860123973 申请日期 1986.05.29
申请人 ANELVA CORP 发明人 SAKAI SUMIO;NAKATSUKA MITSUYOSHI
分类号 H01L21/677;H01L21/67;H01L21/68;H02K49/10 主分类号 H01L21/677
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