| 摘要 |
<p>PURPOSE:To form a metallic pattern film having excellent characteristics as an interconnection or light screening film, by specifying a gas species and an ion species to be used, the temperature of a sample and the way for blowing gas. CONSTITUTION:Hexacarbonyl metal vapor is partially blown to a sample 4 efficiently through a gas gun 7, which has a nozzle in an ion beam projecting region or in the vicinity thereof at first. The sample 4 is cooled by a sample cooling mechanism. The blown hexacarbonyl metal vapor is efficiently adsorbed in the surface of the sample. A converged ion beam 3, which is converged, scanned and controlled with a converged-ion-beam generating part 1, deflecting electrodes 2, a scanning and controlling part 12, an ion-beam-scanning-region setting part 13 and the like, is projected on the surface of the sample 4. The hexacarbonyl metal vapor is continuously blown and the scanning of the converged ion beam is repeated. Thus a metallic pattern film, which has the thickness in proportion to the number of scannings, is formed.</p> |
