ELECTRODE FOR ELECTRIC DISCHARGE MACHINING

摘要

PURPOSE:To obtain electrodes, through which more uniform electric fields are formed between the electrodes and more uniform electric discharge machining operations are carried out in comparison with results attained by using the conventional electrodes by arranging a plurality of non-penetrating holes at a side of electrode facing the other electrode which is formed in a flat shape and has a plurality of through holes for improving ventilation of gas. CONSTITUTION:Electrodes to be used for electrospark machining are composed of a first electrode 14 which is formed in a flat plate shape and has a plurality of through holes 13 for improving ventilation and of a second electrode 16 which faces the first electrode 14 and furthermore, a plurality of non-penerating holes 13a are arranged at a side of the first electrode facing the side of the second electrode 16. For example, both electrodes; one of them is the circular electrode 14 consisting of graphite having a plurality of through holes 13 for improving ventilation of gas introduced from an introduction port and the other one is the electrode to be used for electic discharge machining composed of the electrode 16, on which a wafer 15 is installed and is facing the electrode 14 are arranged at a treatment chest 11 of etching to be performed by plasmas of semiconductor wafer. A plurality of non-penetrating holes 13a which have nearly identical forms with through holes 13 are formed among the through holes 13 at the wafer 15 side of electrode 14.