| 摘要 |
<p>PURPOSE:To realize high speed and highly accurate operation by providing an electrostatic shield electrode to an input wire of an amplifier used for a parallel section and an input/output wire of the parallel section and a capacitor so as to reduce the inter-line coupling capacitance. CONSTITUTION:Lower electrodes 74, 75 of the capacitor are made of polysilicon on a conductive substrate 72 and a field oxide film 73 and parallel section input wires S11, S12, parallel section output wires So1, So2 and input wires SC2, SC3 are made of aluminum on the upper part of the capacitor forming film 76. Then an electrostatic shield electrode 78 is formed on it by aluminum vapor- deposition via an inter-layer insulation film 77. A sufficient effect is obtained for the electrostatic shield electrode 78 by connecting it to ground or power supply. Through the provision of the electrostatic shield electrode in this way, the coupling capacitance between the input/output wires is reduced remarkably and the fixed pattern noise and the gain reduction are reduced.</p> |
