| 摘要 |
PURPOSE:To perform stable detection of a quantity of light and carry out a correct exposure control by providing a reflecting member, in which numerous pin holes are set up on the surface of mirror, in optical pathes of illuminating light and arranging a light detector for setting the amount of exposure in the optical pathes of partial lights which come through the pin holes. CONSTITUTION:A reflecting member 40, through which a part of illuminating light is passable is prepared in optical pathes and an exposure control device is provided in an exposure equipment so that the amount of exposure is controlled by the information of partical lights. In the exposure control device, the above reflecting member 40 is formed by preparing many pin holes 43 in a mirror 42 and a light detector 17 for setting the amount of exposure is arranged in the optical pathes of partial lights which pass through the pin holes 43. For instance, the illuminating light emitted by a mercury lamp 21 at a light source 20 is adjusted at a control part 30 through an elliptic mirror 22 and a total reflection mirror 11 and then, most of lighting is reflected by the reflecting member 40 and enters into a condenser lens 12, resulting in the formation of image for a pattern of reticle 13 at a semiconductor wafer C setting on a stage 15. Passing through numerous pin holes 43 formed in the reflecting member 40, a part of illuminating light is gathered to the light detector 17 through the condenser lens 16 and measured.
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