| 摘要 |
PURPOSE:To ensure and stabilize the support of a vibrator and to decrease number of components by forming a recess in the interior of one of the of lower and upper insulation cases forming a step supporting the vibrator at the bottom face, applying electrode film to a required case of both the cases, connecting both the cases to close the said recess and connecting the electrode film, a vibration electrode and each metallic cap by means of a conductive adhesives between a piezoelectric substrate and the cases so as to form a prescribed space. CONSTITUTION:A recess 11 is formed to a lower side insulation case 10 and steps 12, 13 supporting a vibration electrode 32 of a vibrator 30 is formed at its bottom face. Electrode films 14, 15 in succession from the upper face of the steps 12, 13 are applied to the peripheral of the case 10. The upper side insulation case 20 is formed flat and the electrode films 21, 22 are applied to the corresponding part of the electrode films 14, 15 at the peripheral. Both the cases are adhered by an insulation adhesives 18 to close the recess 11. The vibrator 30 is supported by the steps 12, 13 in the recess 11, the electrode films 14, 15 and the vibration electrode 32 are connected by conductive adhesives 16, 17 and prescribed spaces 11A, 11B are formed respectively between the lower face of the piezoelectric substrate 31 and the recess 11 and between the upper face of the piezoelectric substrate 31 and the lower face of the case 20. The metallic cap 40 is mounted to the assembly of both the cases.
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