发明名称 OPTICAL INSPECTION OF PRINTED CIRCUIT
摘要 The surface of a printed circuit is optically scanned and the data acquired, after some preprocessing, compared to reference data representing a fault-free printed circuit. The preprocessing involves a reduction of the conductivity of the lines in the circuit to connectivity of particular features of the lines. The comparison is carried out by establishing a correspondence between global labels in check points of a certain type, and pre-computed reference global labels in corresponding points, and the global labels of other check points are compared with corresponding ones of the reference, with any miscorrespondence indicating a defect of the 'open circuit' type, while any merge event between different global labels indicates a defect of the 'short circuit' type. The apparatus consists of an optical front end (1) having a data acquisition scanner and pre-processor (6); a signal distributer (2) comprising a first look-up table (8), a transformation unit (9) and a second look-up table (10); a reference comparison subsystem (4) comprising a reference disk (11), a decompressor (12), a comparator (13) and a micropocessor (15); and a general conductivity analysis subsystem (3) comprising a second level signal processor (17) and a host computer (14), the said subsystems being connected to a main host computer (5).
申请公布号 JPS62280975(A) 申请公布日期 1987.12.05
申请号 JP19870100217 申请日期 1987.04.24
申请人 INTERNATL BUSINESS MACH CORP <IBM> 发明人 JIEFUOOSHIYUA BURUTSUKU;DOBU RAMU
分类号 H01L21/66;G01N21/88;G01N21/956;G01R31/28;G01R31/309;G06T1/00;G06T7/00;H05K3/00 主分类号 H01L21/66
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