| 摘要 |
PURPOSE:To obtain the compact turbomolecular pump by arranging a screw pump as a dry type rough pumping part onto the rear stage of a turbomolecular pump part and driving said screw pump by a single driving motor. CONSTITUTION:The casing 8 for a rotary shaft 11 projects upwardly, and the movable vane 2 of a turbomolecular pump is installed at the upper edge. A screw pump consisting of the first screw rotor 12 and the second screw rotor 13 which revolves in interlocking with the first screw rotor 12 is arranged as a dry type rough pump onto a lower casing 7. Therefore, a rough pumping part B and a turbomolecular pump part A can be integrally made compact.
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