| 摘要 |
Targer-carrier device for cathodic sputtering apparatus, of the type comprising a conductive support 1 cooled by a fluid circulation 3, 4 and means for electrical polarisation 7 of the said support. According to the invention the support is equipped, on the one hand, with a compressible conductive layer 9, in particular a thickness of compact felt made of metal fibres and, on the other hand, a conductive removable sheet 8 under the control of fastening means 2b, 8a on the support, so as to clamp and compress the compressible layer 9. The removable sheet 8 has a front face 8d adapted for holding the target made of material to be sputtered, which may be adhesively bonded or brazed to it. <IMAGE>
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