发明名称 MANUFACTURE OF SEMICONDUCTOR LIGHT EMITTING DEVICE
摘要 PURPOSE:To obtain a semiconductor light emitting device of the type for enclosing a lateral light by selectively diffusing Zn or Si in a multiplex quantum well made of a GaAs film and an AlGaAs film to be disordered. CONSTITUTION:A P<+> type GaAs buffer layer 2, a P-type AlGaAs clad layer 3, an MQW active layer 4 made of a GaAs film and an AlGaAs film, an N-type AlGaAs optical guide layer 5, an MQW guide layer 6 made of an N-type GaAs film and an N-type AlGaAs film, an N-type AlGaAs clad layer 7 and an N<+> type GaAs cap layer 8 are sequentially grown on a P<+> type GaAs substrate 1 by a molecular beam epitaxially growing method. The aluminum composition of the optical guide layer is grated to be gradually reduced toward a surface side, the clad layer formed thereon is composed of A GaAs, the aluminum composition is graded to be gradually reduced toward a surface side, and Zn or Si is thereafter selectively introduced so as to disorder the part except a current path in the optical guide layer.
申请公布号 JPS62279689(A) 申请公布日期 1987.12.04
申请号 JP19860122200 申请日期 1986.05.29
申请人 FUJITSU LTD 发明人 SANADA TATSUYUKI
分类号 H01L33/06;H01L33/14;H01L33/30;H01L33/40;H01S5/00;H01S5/343 主分类号 H01L33/06
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