| 摘要 |
PURPOSE:To enable the avoiding of contamination due to poisonous substance, by connecting probe pins arranged in the perimeter of at least one cooling element to probing pads arranged in the perimeter of LSI chips. CONSTITUTION:A number of bare LSI chips 2 are connected to one side of a wiring board 1 and probing pads 4 are arranged in the perimeter of the chips 2. Probing pins 9 are arranged in the perimeter of a heat conducting contact 8 positioned at the center of a cold plate 7 to form one block prober, which allows the contact 8 to be brought into surface contact with other all chips 2 even when all chips 2 are subjected to a block probing. The contact 8 comprises an upper comb-tooth section 18 worked on the plate 7 and a lower comb-tooth section 19 partially fixed with a screw 20 and the comb-tooth 19 can be displaced vertically with a fine clearance 21 between both the comb-tooth sections 19 and 18. This coordinates a relative positional relation between the pate 7 and the chips 2 so satisfactorily as to attain a better surface contact between the lower surface of the comb-tooth section 19 and the back of the chips 2 thereby cooling the chips 2.
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