| 摘要 |
PURPOSE:To suppress by-production of higher silane and improve the yield of monosilane, by reacting magnesium silicide with an ammonium salt in the presence of liquid ammonia while suppressing the water-content of the reaction system below a specific level. CONSTITUTION:Magnesium silicide is reacted with an ammonium salt (e.g. ammonium chloride) in the presence of liquid ammonia suppressing the water- content of the reaction system to <=0.5pts.wt. per 100pts.wt. of magnesium silicide. The by-production of disilane, trisilane, etc., can be suppressed and the yield of monosilane can be improved by this process. The water-content of the reaction system can be suppressed below the above level e.g. by sufficiently drying the raw materials such as liquid ammonia, magnesium silicide, ammonium salt, etc., as well as the reactor, pipings, etc., or by adding a desiccant such as sodium sulfate anhydride, calcium chloride, silica gel, etc., to the reaction system.
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