| 摘要 |
PURPOSE:To enable an inspection to be performed without requiring a troublesome adjusting work and with little measuring error by rotating an X-axis linear image sensor and a Y-axis linear image sensor by freely rotatable X-axis and Y-axis inspecting arms, respectively. CONSTITUTION:An electrified cassette 2 is carried on a transfer rail 1, one of objects 3 to be measured arranged on the cassette 2 is positioned in a measuring position and further current is made to flow in the object 3 via the cassette 2 to emit light. Then, first an X-axis inspecting arm 12 is rotated by a motor on the side of an X-axis whereby an optical output in an X-axis direction is measured by an X-axis linear image sensor 10 conducting a circular arc motion above the object 3 being measured. Then, a rotation is likewise conducted on the side of a Y-axis and the optical output in a Y-axis direction is measured by a Y-axis linear image sensor 11 on the distal end of an inspecting arm 13. Thus, an optical output pattern is measured as the far-field pattern of the object 3 being measured. After measurements in the directions of both the axes are terminated, the subsequent object 3 to be measured is positioned in the measuring position by carrying the cassette 2 and a subsequent measurement is conducted. |
