| 摘要 |
The apparatus for carrying out local chemical analysis at the surface of solid materials by spectroscopy of X photoelectrons comprises an ultrahigh vacuum analysis chamber (1) wherein is housed the sample to be analyzed (2) which is connected to a manipulator (3) arranged outside said chamber (1), an analyzer (4) situated in the vicinity of the sample and an electron source (5) emitting an electronic beam (10). The apparatus of the present invention is characterized in that it comprises between the electronic beam (10) and the sample (2) which is a solid massive material a microsource of X photons (6) arranged as close as possible to said massive sample (2). |
