MASS PRODUCTION TYPE FILM FORMING DEVICE

摘要

PURPOSE:To uniformly maintain the temp. of respective substrates and to quickly form thin films without having uneven quality by mounting the substrates respectively to plural pieces of heat pipes contg. working fluid and controlling the temp. of the substrates via the working fluid. CONSTITUTION:The working fluid 13 is sealed into cylinder bodies 12a-12d having good heat conductivity to form the circular cylindrical heat pipes 11a-11d and photosensitive drums 3a-3d are respective mounted thereto. A housing 14 is installed to the lower part of the heat pipes 3a-3d. The working fluid 13 in the housing 14 and the working fluid 13 in the heat pipes 11a-11d are continuously untied. The housing 14 is enclosed by a heating source 15 except the top surface. The working fluid 13 is heated by a heating source 15 and the heating temp. is controlled by a temp. controller 16. The surfaces of the drums 3a-3d are thereby uniformly heated without the uneven temp. and the uniform thin films are formed thereon.