Device for processing workpieces with an electron beam

摘要

The invention relates to a device for processing workpieces with an electron beam, consisting of a working chamber (11) and at least one electron beam gun (10) which is attached to the working chamber on a displaceable plate (24), the working chamber (11) and the plate (24) having through-openings (14, 29) for the electron beam. In order to reduce the pumping time so that the working chamber (11) can be evacuated quickly, according to the invention at least one sealing plate (37) is arranged between the electron beam gun (10) and working chamber (11) in order to seal off the through-opening (14) opening for the electron beam, of the working chamber (11) (Fig. 1). <IMAGE>