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发明名称
DEPTH DEPENDENT IMPLANTATION OF PARTICLES IN TARGET
摘要
申请公布号
GB8725159(D0)
申请公布日期
1987.12.02
申请号
GB19870025159
申请日期
1987.10.27
申请人
KERNFORSCHUNGSZENTRUM KARLSRUHE GMBH
发明人
分类号
G21K1/10
主分类号
G21K1/10
代理机构
代理人
主权项
地址
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