摘要 |
<p>PURPOSE:To improve the corrosion resistance of a thin film medium by coating a filter with one or >=2 of Ni, Co, Cr, Pb, Al, Sn and Mn or the alloy of these elements and then laminating a carbon thin film on the filter. CONSTITUTION:The structure itself of a thin film medium is applied to a filter. The magnetic layer of a thin film magnetic medium for subject of corrosion resistance consists of Co-P, Co-Cr, Co-Ni-Cr, etc. A respiration filter and a circulation filter use fluorine, polypropylene, polyethylene, vinyl acetate, etc. with normally 0.1-1mum bore. These filters are coated with one or >=2 of Ni, Co, Cr, Pb, Al, Sn and Mn or the alloy of these elements. Furthermore a carbon layer is laminated on the filters. Here the metals having high reaction to the injurious gas volutant are used. This film containing at least two layers has the <=0.2mum total thickness together with a metallic layer of 0.001-0.02mum and the carbon layer of 0.01-0.1mum respectively.</p> |