发明名称 |
BLOCK POLYMER COMPOSITION |
摘要 |
Block polymer compositions are provided which are useful as positive or negative resists utilizing aryl onium salts in combination with silicone-organic block polymers, such as polydimethylsiloxane-poly-t-butylmethacrylate block polymers. A silicone prepolymer is used in combination with certain polymerizable vinyl monomers such as t-butylmethacrylate. The silicone prepolymer has chemically combined pinacolate groups in the backbone or terminal positions which are capable of generating free-radicals upon thermolysis. |
申请公布号 |
JPS62277417(A) |
申请公布日期 |
1987.12.02 |
申请号 |
JP19870096395 |
申请日期 |
1987.04.21 |
申请人 |
GENERAL ELECTRIC CO <GE> |
发明人 |
JIEEMUZU BINSENTO KURIBERU |
分类号 |
C08F293/00;C08G85/00;C08K5/00;C08L53/00;C08L83/10;G03F7/075 |
主分类号 |
C08F293/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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