| 发明名称 |
A PROCESS FOR THE PRODUCTION OF A COMPOUND CRYSTAL |
| 摘要 |
In the production of a compound bulk crystal (16) having a convex surface or concave surface by the CVD method, an improvement is achieved by revolving a part of a deposition substrate (14). |
| 申请公布号 |
EP0132037(B1) |
申请公布日期 |
1987.12.02 |
| 申请号 |
EP19840303775 |
申请日期 |
1984.06.05 |
| 申请人 |
SUMITOMO ELECTRIC INDUSTRIES LIMITED |
发明人 |
NAMBA, HIROKUNI OSAKA WORKS OF SUMITIOMO ELECTRIC |
| 分类号 |
C30B25/00;C30B25/02;C30B25/04;C30B25/18;C30B29/48;H01L21/205 |
主分类号 |
C30B25/00 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
