| 摘要 |
PURPOSE:To prevent the rise in the density of a vapor in the system of a solvent by providing a compressor in the circulating system of said solvent and providing a cooler on its rear stage, and injecting said solvent after cooled from a nozzle into a cleaning vessel. CONSTITUTION:A compressor 28 for compressing a recovered solvent vapor is provided in a solvent circulating system 22, a cooler 50 for cooling the solvent vapor is provided on its rear stage, and the solvent vapor from the cooler 50 is injected from a nozzle 32 which is provided together with a slurry 12 in a cleaning vessel 10, to an object to be cleaned. Thus, by injecting the solvent after cooled from the nozzle 32 into the cleaning vessel 10, the temp. of the solvent vapor can be lowered due to cooling by means of the cooler 50 and adiabatic expansion at the time of injecting. Accordingly, the temp. in the cooling vesel 10 can be kept low preventing the rise in the temp. of the solvent vapor, and preventing the solvent from becoming mist while reducing the leaking quantity of the solvent from the cleaning vessel 10 after the cleaning is finished.
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