| 摘要 |
PURPOSE:To enhance the extent of responsiveness, by driving a pump body in amplifying the displacement quantity of a piezoelectric actuator element, and performing flow control by an electric signal to be added to this piezoelectric actuator element. CONSTITUTION:A piezoelectric actuator element 1 is unitized with levers 5 and 6 via both displacement transfer members 3 and 4, amplifying a displacement quantity. Other displacement transfer members 10 and 11 are connected to these levers 5 and 6 for unitization, and a pump body 12 is connected thereto. When an electric signal is added to a lead wire 2, the piezoelectric actuator element 1 is displaced to some extent, operating this pump body 12. Therefore, as the piezoelectric actuator element, driving force is able to be ever so strong, thus a speed of response is well enhanced. |
