发明名称 Bisneopentyl alkyl organometallic compounds and methods of preparing same
摘要 In the manufacture of semiconductors it is desirable to make controlled deposits of certain phosphides or arsenides of trivalent metals such as gallium and indium. There are provided novel alkyl bisneopentyl derivatives of these metals whose stability and volatility characteristics makes them ideally suited for the above purpose.
申请公布号 US4710575(A) 申请公布日期 1987.12.01
申请号 US19860894571 申请日期 1986.08.08
申请人 THE RESEARCH FOUNDATION OF STATE UNIVERSITY OF NEW YORK 发明人 BEACHLEY, JR., ORVILLE T.
分类号 C07F5/00;C07F5/06;(IPC1-7):C07F5/00 主分类号 C07F5/00
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