| 摘要 |
PURPOSE:To manage the position accuracy and height uniformity accuracy of probe needles easily under highly accurate conditions by a method wherein a prober is composed of an insulating substrate in which a plurality of fine holes are drilled and the probe needles whose base ends are fixed to the insulating substrate and whose tips are protruded from the back surface of the insulating substrate. CONSTITUTION:A square window 2 is opened in a thin insulating substrate 1 and a plurality of fine holes 3 are drilled around the window 2 and a plurality of probe needles 5 made of conductive wire material such as tungsten are attached to the front surface of the insulating substrate 1. The probe needle 5 is formed to have an approximate L-shape and its base end is connected to a wiring pattern 4 and the tip of the part which is bent to form a right angle is inserted into the fine hole 3 and protruded from the rear surface of the insulating substrate 1. With this constitution, the two-dimensional position of the probe needle 5 can be determined by the position of the fine hole 3 so that the high position accuracy can be maintained. Moreover, as the uniformity of the heights of the probe needles 3 is determined by the lengths of the tip parts which are bent to form right angles, the high accuracy of the height uniformity can be maintained by forming all the probe needles with identical dimensions.
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